Equipment for water treatment and process separation
Evergreen is an authorised distributor of Liqui-Cel® membrane contactors and Electropure EDI modules (manufactured by SnowPure). These modules provide dissolved-gas control and continuous ionic removal within water-treatment systems selected for semiconductor process-water requirements.
Evergreen also supplies EVERPACK packings, column internals, and mist eliminators for solvent recovery and exhaust-treatment duties. Packings support gas–liquid contact in absorption scrubbers or separation in solvent-recovery columns, while mist eliminators collect entrained liquid droplets and aerosols.
Equipment selection considers the fluid chemistry, operating loads, required separation performance, pressure drop and material compatibility. Engineering support and the supply scope are agreed to suit project requirements.
Selected semiconductor applications
Ultrapure Water for Wafer Processing & Cleaning
Liqui-Cel® membrane contactors for dissolved-gas control and Electropure EDI modules for continuous ionic removal in ultrapure-water systems serving wafer rinsing, wet processing and cleaning. Module selection considers feed-water quality, operating flow, required outlet quality and the overall treatment arrangement.
- Liqui-Cel® membrane contactors
- Electropure EDI (manufactured by SnowPure)
Acid-Mist Removal
Mist eliminators for acid droplets and fine aerosols in exhaust-treatment systems serving wet processing and cleaning operations. Mesh, vane or fibre-bed designs are selected according to droplet size, liquid loading, allowable pressure drop and acid chemistry. Media and construction materials must suit the service; glass-fibre media are not suitable for hydrofluoric acid duties.
- EVERMESH mist eliminators
- EVERON vane mist eliminators
- EVERFIBRE fibre-bed mist eliminators — service-specific media
Process Exhaust Scrubbing
Packings and liquid distributors support gas–liquid contact in absorption scrubbers selected for the process exhaust. Mist eliminators collect entrained scrubbing-liquid droplets at the outlet. Equipment and materials are selected for the gas composition, scrubbing liquid, temperature and fouling potential.
- EVERPACK packings
- EVERGREEN column internals
- EVERMESH mist eliminators
- EVERON vane mist eliminators
Solvent Recovery & Purification
Packings and column internals for solvent recovery and purification duties associated with semiconductor manufacturing. Packing type and materials are selected to suit the solvent, operating conditions and required separation performance.
- EVERPACK packings
- EVERGREEN column internals
Product range